PQL’s continuing development of its ‘Linear Target’ System has provided another breakthrough result when the 50cm cylindrical target was tested for the first time this month. Results have confirmed that plasma generation efficiency is maintained along the length of the target, providing a uniform plasma density for high rate sputtering from the whole target surface.
Substantial in-house R&D over the last year has shown that this configuration has many benefits:
- More efficient use of plasma source
- Eliminates need to scale source with target
- Greatly increased coating area
- Greatly increased coating rates
- Retains all HiTUS advantages – improves reactive stability.
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